used
CO2 Cylinder Cabinet Wafer size: 200mm
Gas Distribution system Wafer size: 200mm
Gas Distribution Box F1(155-158) Wafer size: 200mm
Gas Distribution Box F3(351-354) Wafer size: 200mm
Gas Distribution Box F3(356-358) Wafer size: 200mm
HE Cylinder Cabinet Wafer size: 200mm
F2/KR/NE Cylinder Cabinet Wafer size: 200mm
KR/NE Cylinder Cabinet Wafer size: 200mm
C5F8 Cylinder Cabinet Wafer size: 8"
BCL3 Cylinder Cabinet Wafer size: 8"